Early Prediction of Product Performance and Yield Via Technology Benchmark

Choongyeun Cho, Daeik Kim, Jonghae Kim, Daihyun Lim, and Sangyeun Cho

IEEE Custom Integrated Circuits Conference (CICC) 2008, Sep 2008

Abstract

This paper presents a practical method to estimate IC product performance and parametric yield solely from a well-chosen set of existing electrical measurements intended for technology monitoring at an early stage of manufacturing. We demonstrate that the components of mmWave PLL and productlike logic performance in a 65nm SOI CMOS technology are predicted within a 5% RMS error relative to mean.

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