Early Prediction of Product Performance and Yield Via Technology Benchmark
Choongyeun Cho, Daeik Kim, and Daihyun Lim
IBM Technical Exchange Conference (IBM-TEC) 2008, Oct 2008
Abstract
This paper presents a practical method to estimate IC product performance and parametric yield solely from a well-chosen set of existing electrical measurements intended for technology monitoring at an early stage of manufacturing. We demonstrate that the components of mmWave PLL and productlike logic performance in a 65nm SOI CMOS technology are predicted within a 5% RMS error relative to mean.
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