Linking Product and Manufacturing Via a Statistical Framework

Choongyeun Cho

Invited seminar at Communication Technologies Department Seminar (IBM T.J. Watson Research Center), July 2007

Abstract

I will present a statistical framework to cooperatively design and develop technology, product circuit, benchmarking and model early in the development stage. The statistical data-driven approach identifies device characteristics that are most correlated with a product performance, and estimates performance yield. A statistical method that isolates systematic process variations on die-to-die and wafer-to-wafer scales is also proposed. The proposed framework enables translations of interactions among technology, product, and model, and facilitates collaborative efforts accordingly. The proposed methodology has been applied to first three development generations of 65nm SOI technology node (11S) and server microprocessor product current-controlled oscillators (ICOs) for PLLs that were migrated from 90nm. Automated manufacturing floor in-line characterization and bench RF measurements are used for the methodology. The ICOs exhibit yield improvement of RF oscillation frequency from 47% to 99% across three evolving 11S technology generations.

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