Integrated Inductor Actively Engaging Metal Filling Rules
Jeong-Il Kim, Byunghoo Jung, Dimitrios Peroulis, Daeik Kim, Jonghae Kim, and Choongyeun Cho
IEEE Custom Integrated Circuits Conference (CICC) 2007, 16-19 Sep. 2007
Abstract
This paper reports a new strip-patterned integrated inductor that actively engages metal filling rules leading to reduced manufacturing cost and process-induced uncertainties while simultaneously maintaining state-of-the-art performance. The striped inductor consists of parallel horse shoe-shape metal lines in the foot print of a single-line inductor. The new inductor structure is backed by experimental and simulated results that demonstrate the design methodology in the presence of process uncertainties typically not known to the circuit designer.Download
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