A 70GHz Manufacturable Complementary LC-VCO with 6.14GHz Tuning Range in 65nm SOI CMOS

Daeik Kim, Jonghae Kim, Jean-Olivier Plouchart, Choongyeun Cho, Daihyun Lim, Robert Trzcinski, Mahender Kumar, Christine Norris, and David Alhgren

IEEE International Solid-State Circuits Conference (ISSCC) 2007, Feb. 2007 Page(s):540 - 620
DOI: 10.1109/ISSCC.2007.373533

Abstract

A complementary LC VCO is integrated in 65nm SOI, and statistically characterized on a 300mm wafer. Average center frequency is 67.9GHz, and frequency tuning range is 6.14GHz, or 9.05%. Maximum frequency is 73.5GHz, and maximum FTR is 6.68GHz. A phase noise at 10MHz offset is -106dBc/Hz, and power consumption is 5.37mW at 1.2V. The VCO yield is 94.7% for 70GHz operation.

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